polycrystalline silicon strength

Strength Reliability of Micro Polycrystalline Silicon

Keywords: Polycrystalline silicon, Strength, Reliability, Stress concentration, Weibull analysis, Effective surface area 1 Introduction Polycrystalline silicon (polySi) structure is widely employed in the MicroElectroMechanical Systems (MEMS) 1, 2) MEMS devices, which contain mechanical movement, have to maintain their reliability in face of external shock, thermal stress and residual

Polycrystalline Silicon an overview | ScienceDirect Topics

Polycrystalline silicon carbide (SiC) has been extensively used in the ceramics industry and is mainly known for its mechanical strength and refractory characteristics Hence, it is extensively used as a grinding agent and a refractory highstrength coating in machining tools In recent years, there has been widespread interest in the fabrication of epitaxial singlecrystal SiC for use as a

Fracture Strength of Polycrystalline Silicon

Fracture Strength of Polycrystalline Silicon January 2011; MRS Online Proceeding Library Archive 518; DOI: 101557/PROC518197 Authors: PT Jonestt GC Johnsontt RT Howe Request full

(PDF) STRENGTH OF POLYCRYSTALLINE SILICON CARBIDE

Tensile microspecimens (31 mm long with a 150 µm by 200 µm crosssection) of polycrystalline silicon carbide were tested at room temperature using an established method The fracture strength

Fracture Strength of Polycrystalline Silicon Wafers for

The fracture strength of polycrystalline silicon wafers has been investigated by means of twist and four‐point bending tests Under a twisting configuration, which generates high tensile stresses within the middle of the wafers, a unimodal distribution in strength is obtained The characteristic strength and Weibull modulus are 1310 MPa, and 144, respectively Under a four‐point bending

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Fracture Strength of Polycrystalline Silicon | MRS Online

· The strength of a material is determined by measuring the displacement at fracture of cantilever beams bending inplane This device has been used to measure the fracture strain of three different polysilicon materials: polysilicon from two different MCNC MUMPS runs and a polysilicon fabricated at the Microfabrication Laboratory at the University of California at Berkeley The strain at

Cited by: 22

Strength Distributions in Polycrystalline Silicon MEMS

IEEE Xplore, delivering full text access to the world's highest quality technical literature in engineering and technology | IEEE Xplore

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TENSILE STRENGTH AND FRACTURE TOUGHNESS OF SURFACE

1/6 tensile strength and fracture toughness o f surface micromachined polycrystalline silicon th in films prepared under various conditions toshiyuki tsuchiya, jiro sakata, yasunor i taga

Polycrystalline Silicon an overview | ScienceDirect Topics

Polycrystalline silicon carbide (SiC) has been extensively used in the ceramics industry and is mainly known for its mechanical strength and refractory characteristics Hence, it is extensively used as a grinding agent and a refractory highstrength coating in machining tools In recent years, there has been widespread interest in the fabrication of epitaxial singlecrystal SiC for use as a

Fracture Strength of Polycrystalline Silicon | MRS Online

The strength of a material is determined by measuring the displacement at fracture of cantilever beams bending inplane This device has been used to measure the fracture strain of three different polysilicon materials: polysilicon from two different MCNC MUMPS runs and a polysilicon fabricated at the Microfabrication Laboratory at the University of California at Berkeley The strain at

The strength of polycrystalline silicon at the micro and

The strength of polycrystalline silicon at the micro and nanoscales with applications to MEMS Chasiotis, Ioannis; Abstract A new method for tensile testing of thin films by means of an improved apparatus has been developed to measure the elastic properties (Young's modulus, tensile strength) of surface micromachined polycrystalline silicon specimens The newly designed tensile tester makes

Strength Distributions in Polycrystalline Silicon MEMS

IEEE Xplore, delivering full text access to the world's highest quality technical literature in engineering and technology | IEEE Xplore

Strength Reliability of Micro Polycrystalline Silicon

In order to evaluate strength reliability of micron size polycrystalline silicon (polySi) structure, bending tests of cantilever beam and Weibull analysis are performed Recently, the importance of microelectromechanical systems (MEMS) in society is increasing, and the number of production is also increasing The MEMS devices, which contain mechanical movement, have to maintain their

Tensile Strength and Fracture Toughness of Surface

We applied this tester for polycrystalline silicon (polySi) thin films prepared under various conditions The microstructure of the film is controlled by the crystallizing temperature The process conditions and the microstructures that contribute to the strength of polySi film are identified by the tensile strength and the fracture toughness

Polycrystalline Silicon | AMERICAN ELEMENTS

The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823 Silicon makes up 257% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen The metalloid is rarely found in pure crystal form and is usually

Failure of Silicon: Crack Formation and Propagation

• fracture strengths ~ 3 to 5 GPa in polycrystalline siliconabove the DBTT, silicon becomes gradually ductile • glide motion of (a/2)<110> dislocations on {111} planes • dissociation into (a/6)<112> Shockley partials with 46 nm stacking faults • heterogeneous dislocation nucleation in “dislocationfree” crystals eg, at surfaces or due to deformationinduced amorphous Si

Monocrystalline an overview | ScienceDirect Topics

The observed fall in strength around 300°C, which is then followed by an increase in strength around 500°C, Polycrystalline silicon (poly cSi): The next type of cSi PV module is the poly cSi, whose market is a bit lower when compared to mono cSi The problem of metal contamination exists in mono cSi and to limit such problems, the industry has come up with poly cSi cells Like the

Specimen size effect on tensile strength of surface

A new tensile tester using an electrostaticforce grip was developed to evaluate the tensile strength and the reliability of thinfilm materials The tester was constructed in a scanning electron microscope (SEM) chamber for in situ observation and was applied for tensile testing of polycrystalline silicon (polySi) thin films with dimensions of 30300 /spl mu/m long, 25 /spl mu/m wide, and 2

Strength of polycrystalline silicon carbide | SpringerLink

Strength of polycrystalline silicon carbide G S Oleinik 1 & M L Gorb 1 Soviet Powder Metallurgy and Metal Ceramics volume 13, pages 1014 – 1017 (1974)Cite this article 22 Accesses This is a preview of subscription content, log in to check access Access options Buy single article Instant access to the full article PDF US$ 3995 Price includes VAT for USA Subscribe to journal

Strength Reliability of Micro Polycrystalline Silicon

Strength Reliability of Micro Polycrystalline Silicon Structure Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto Department of Mechanical Engineering, Fa culty of Engineering, Kyushu University Japan 1 Introduction Polycrystalline silicon (polySi) structure is widely employed in the MicroElectro

Characterization of strength properties of thin

The aim of this work is to characterize the strength properties of polycrystalline silicon (polysilicon) with the use of tensile and bending test specimens The strength of thin polysilicon films with different geometry, size and stress concentrations has been measured and correlated with the effective size of the specimen and its stress distribution

JPA High strength polycrystalline silicon

A polycrystalline silicon rod having high strength and excellent crack resistance is provided When a polycrystalline silicon rod is manufactured by a Siemens method using silanes as a raw material, the surface temperature of the rod is controlled within a range of 950 to 1010 ° C, and a raw material gas supply amount per unit surface area of the rod

Measurement of the intrinsic strength of crystalline and

· The silicon tip is then replaced with a customfabricated single the experimental techniques outlined in this work can easily be used to study the strength of other 2D polycrystalline

Measurement of the intrinsic strength of crystalline and

Measurement of the intrinsic strength of crystalline and polycrystalline graphene Haider I Rasool1,2,3,4, Colin Ophus5, William S Klug4,6, highresolution silicon tip to double check for the absence of holes or folds in the graphene membrane (Fig 1d) The silicon tip is then replaced with a customfabricated singlecrystal diamond probe with a large tip radius of 115nm for mechanical

USB2 Polycrystalline silicon and method for the

Brittle polysilicon rods having a rod crosssection of 8099% available for electrical conduction and a flexural strength of 01 to 80 N/mm 2 are produced by a process wherein the temperature of the bridge of polysilicon rods in the Siemens process is held at a high temperature and the flow rate of chlorosilanes is increased to the maximum within a short time

Failure of Silicon: Crack Formation and Propagation

• fracture strengths ~ 3 to 5 GPa in polycrystalline siliconabove the DBTT, silicon becomes gradually ductile • glide motion of (a/2)<110> dislocations on {111} planes • dissociation into (a/6)<112> Shockley partials with 46 nm stacking faults • heterogeneous dislocation nucleation in “dislocationfree” crystals eg, at surfaces or due to deformationinduced amorphous Si

[PDF] Specimen size effect on tensile strength of surface

A new tensile tester using electrostatic force grip was developed to evaluate the tensile strength and the reliability of thin film materials The tester was constructed in a SEM chamber for insitu observation, and was applied for tensile testing of polycrystalline silicon (polySi) thin films with dimensions of 30300 /spl mu/m long, 25 /spl mu/m wide and 2 /spl mu/m thick

What is polycrystalline material? Quora

Hari om, you are asking a question as to: “What is polycrystalline material?” A material which is having a number of grains is called a polycrystalline material For example, if you consider one brick (used in Civil construction) as a single grai